Microelectronics Technology: Polymers for Advanced Imaging and Packaging (ACS Symposium Series) - Hardcover

9780841233324: Microelectronics Technology: Polymers for Advanced Imaging and Packaging (ACS Symposium Series)
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ISBN 10: 0841233322 ISBN 13: 9780841233324
Publisher: American Chemical Society, 1995
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Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic applications. Discusses new approaches to silicon-containing resists and multilevel processes. Explores the design of low-dielectric polymer materials for microelectronic applications.

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Reichmanis, Elsa; Ober, Christopher K.; MacDonald, Scott A.; Iwayanagi, Takao; Nishikubo, Tadatomi
Published by American Chemical Society (1995)
ISBN 10: 0841233322 ISBN 13: 9780841233324
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