Polymers in Microlithography: Materials and Processes (ACS Symposium Series) - Hardcover
This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing, and novel chemistry and processes for microlithography. Each section contains an introduction written by a recognized expert in the field.
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About the Author:
Elsa Reichmanis is at ATandT Bell Laboratories. Scott A. MacDonald is at Almaden Research Center.
"About this title" may belong to another edition of this title.
- PublisherAmerican Chemical Society
- Publication date1989
- ISBN 10 0841217017
- ISBN 13 9780841217010
- BindingHardcover
- Number of pages433
- EditorReichmanis Elsa, MacDonald Scott A., Iwayanagi Takao
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Polymers in Microlithography: MateriaReichmanis, Elsa; MacDonald, Sco
Published by
American Chemical Society
(1989)
ISBN 10: 0841217017
ISBN 13: 9780841217010
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Hardcover
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Polymers in Microlithography Materials and Processes (Hardback)
Published by
American Chemical Society
(1989)
ISBN 10: 0841217017
ISBN 13: 9780841217010
Used
Hardcover
Quantity: 1
Seller:
Rating
Book Description Hardback. Condition: Muy Bueno / Very Good. Seller Inventory # 100000000665765
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US$ 390.59
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