An Introduction to Microelectromechanical Systems Engineering - Hardcover

Nadim Maluf

9780890065815: An Introduction to Microelectromechanical Systems Engineering
Hardcover
ISBN 10: 0890065810 ISBN 13: 9780890065815
Publisher: Artech House Publishers, 2000
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Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.

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About the Author:
Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.

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  • PublisherArtech House Publishers
  • Publication date2000
  • ISBN 10 0890065810
  • ISBN 13 9780890065815
  • BindingHardcover
  • Edition number2
  • Number of pages265

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Book Description Gebunden. Condition: New. InhaltsverzeichnisMEMS - a technology from Lilliput the sandbox - listing materials for MEMS the toolbox - processes for micromachining the gearbox - commercial MEM structures and order systems the new gearbox - a peek into the futur. Seller Inventory # 898961688

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